Automated Vacuum Units and Deposition Equipment
Shareholders in Portfolio Company
1 bln rubles
Co-investment by RUSNANO0.20 bln rubles
Production of automated vacuum units and deposition equipment. Establishment of center for developing new deposition methods and servicing equipment
The project will produce ESTO-Vacuum’s Caroline series of modular and cluster automated vacuum units for forming micro- and nanostructures. The units are used extensively in production of semiconductor and power devices, micromechanical systems, quartz resonators, semiconductor lasers, and LEDs based on gallium nitride, gallium arsenide, and indium phosphide.
ESTO-Vacuum units are manufactured using one technology platform. Each unit is equipped with an integrated modem for transmission of data to support services in the event of malfunctioning and for online tuning.
The company also produces a line of vacuum units for deposition of various modified coatings: anticorrosive, wear-resistant, strengthening, and other coatings. As part of the project, the ESTO-Vacuum plans to open a center where it will update existing vacuum equipment, develop new equipment, and develop new deposition methods by order.
Areas of application
- Electronics, avionics, and micromechanical systems
- Engineering and toolmaking
- Manufacturers of microelectronics and instruments
- Product attributes equal to world’s best
- Competitive pricing
- Online service
- Adapted software
- Established servicing system, including online service
- Ability to build complex solutions
- Automated production line
13 April 2011
Technologies and Products
Schematic drawing of the technology chamber of the Caroline D12A1, an automated unit for magnetron, thermal, and ion beam deposition
The unit can process ceramic, silicon, and zerodur flat substrates of up to 100 mm in diameter.