Portfolio Companies


Automated Vacuum Units and Deposition Equipment

Shareholders in Portfolio Company 

Industry Sector 
Coatings and Surface Modification

Production Location 
Zelenograd, administrative subdivision of Moscow
Job created: 40

Investment Started:  2011

Total Budget

1.18  bln rubles
Co-investment by RUSNANO
335.5  mln rubles

Production of automated vacuum units and deposition equipment. Establishment of center for developing new deposition methods and servicing equipment

The project will produce RU-VEM’s Caroline series of modular and cluster automated vacuum units for forming micro- and nanostructures. The units are used extensively in production of semiconductor and power devices, micromechanical systems, quartz resonators, semiconductor lasers, and LEDs based on gallium nitride, gallium arsenide, and indium phosphide.

RU-VEM units are manufactured using one technology platform. Each unit is equipped with an integrated modem for transmission of data to support services in the event of malfunctioning and for online tuning.

The company also produces a line of vacuum units for deposition of various modified coatings: anticorrosive, wear-resistant, strengthening, and other coatings. As part of the project, the RU-VEM plans to open a center where it will update existing vacuum equipment, develop new equipment, and develop new deposition methods by order.

Areas of Application

  • Electronics, avionics, and micromechanical systems
  • Engineering and toolmaking
  • Medicine
  • Optics


  • Manufacturers of microelectronics and instruments

Competitive Advantages

  • Product attributes equal to world’s best
  • Competitive pricing
  • Online service
  • Adapted software
  • Established servicing system, including online service
  • Ability to build complex solutions
  • Automated production line

Schematic drawing of the technology chamber of the Caroline D12A1Schematic drawing of the technology chamber of the Caroline D12A1, an automated unit for magnetron, thermal, and ion beam deposition

The unit can process ceramic, silicon, and zerodur flat substrates of up to 100 mm in diameter.