Mapper LLC

The Production of MEMS Elements for Electro-optical Systems Used in Lithography Devices

Producer of a wide range of microelectromechanical systems (MEMS-foundry) on a contract manufacturing basis

Mapper LLC was founded in 2012 as part of a joint project between RUSNANO and the Dutch company Mapper Lithography aimed at producing MEMS elements for electro-optical systems used in lithography devices.

In 2014 Mapper LLC, supported by specialists from the Dutch company Mapper Lithography and leading contractors and planners with experience in this field, constructed a facility in the Moscow Technopolis SEZ and launched the production of MEMS elements. Over the next four years Mapper LLC was able to successfully develop the core technology, optimize technological processes and launch mass production of the full range of MEMS elements for electro-optical systems ordered by Mapper Lithography—in total more than 30 different modifications.

To use the internationally-accepted industry terminology, Mapper LLC works as a MEMS foundry—a factory making MEMS elements on a contract manufacturing basis. Moreover, Mapper LLC develops its own technology for the production of these items, based on its existing technological processes. In its facility Mapper LLC has built an automated production line for 100 mm silicon wafers (which can be adapted for the production of 150 and 200 mm wafers in the future) and developed supporting infrastructure for the mass production of MEMS elements, which will allow it to produce a wide range of innovative elements for various customers in Russia and internationally on a contract manufacturing basis.

The company has clean technical premises (compliant with the ISO 6 standard for cleanrooms) and equipment used in the production of MEMS elements on silicon wafers. In February 2019 TÜV Rheinland awarded it an international quality management system certificate, confirming its compliance with GOST R ISO 9001:2015.

The company’s core staff have experience in working abroad, and its production specialists have undergone on-site training in the Netherlands. In the view of its Russian partners in the industry, Mapper LLC’s production of MEMS elements meets the standards applied in the most advanced European factories.

Mapper LLC makes preproduction prototypes and mass produces items for more than 10 customers in the Russian market. The company is expanding its work with Russian clients, and has approximately 15 potential customers.

Areas of Application

MEMS elements are primarily used in different types of electronic sensors or electromechanical transformers.

Mapper LLC manufactures MEMS elements and develops related technological processes for use in the following core applications:

• sensors used in gyroscopes and accelerometers, for use in inertia-based navigation systems
• matrix elements for non-refrigerated infrared detectors forming part of thermal imaging components used in systems to measure human temperature and in complex security systems with thermal cameras
• SAW radio frequency filters for use in new-generation radio telecommunications and satellite navigation systems
• LIDAR micromirrors for use in autonomous vehicles
• probes (cantilevers) for use in atomic force microscopes.

Market

• Producers of inertia-based navigation systems: TechnoComplex Inertia Technologies JSC (Ramenskoye), Girooptika JSC (Saint-Petersburg), Isense LLC (Moscow).
• ASTRON OKB (Lytkarino), the leading producer of thermal imaging equipment.
• BUTIS Research and Production Center (Moscow), the leading developer and producer of high-frequency band filters.

Competitive Advantages

Russia’s only facility with the capacity to mass produce MEMS elements.

Mapper LLC’s MEMS production provides its Russian partners with manufacturing services consistent with the quality standards set by the best European factories, at European price levels. Mapper LLC also develops technological processes to enable its customers to launch production operations, beginning with small batches.